Physical properties of amorphous silicon-carbon alloys produced by different techniques | Zendy

A. Carbone | Zendy; F. Demichelis | Zendy; G. Kaniadakis | Zendy; G. Della Mea | Zendy; F.L. Freire | Zendy; P. Rava | Zendy

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Physical properties of amorphous silicon-carbon alloys produced by different techniques

Author(s) -

A. Carbone,

F. Demichelis,

G. Kaniadakis,

G. Della Mea,

F.L. Freire,

P. Rava

Publication year - 1990

Publication title -

journal of materials research/pratt's guide to venture capital sources

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.788

H-Index - 148

eISSN - 0884-2914

pISSN - 0884-1616

DOI - 10.1557/jmr.1990.2877

Subject(s) - materials science , sputtering , silicon , glow discharge , carbon fibers , amorphous solid , amorphous silicon , silicon carbide , analytical chemistry (journal) , hydrogen , electrical resistivity and conductivity , deposition (geology) , chemical engineering , thin film , metallurgy , composite material , nanotechnology , crystallography , crystalline silicon , plasma , composite number , chemistry , engineering , biology , chromatography , quantum mechanics , physics , organic chemistry , sediment , electrical engineering , paleontology

Results of a study of compositional, optical, electrical, and structural properties of hydrogen amorphous silicon carbide (a-SiC:H) prepared, respectively, by glow-discharge (GD) and reactive sputtering (SP) techniques at power densities varying between 1.25 · 10−2 and 1.25 · 10−1 W · cm−2 for GD samples are presented. Measurements are reported on the composition, optical and IR spectroscopy, and on the temperature dependence of electrical conductivity. All experimental observations suggest that the power density only slightly affects the physical properties of GD silicon-rich samples, whereas those of the carbon-rich SP samples depend more strongly on this deposition parameter. Finally, it is shown that the GD technique can provide films with better characteristics, whereas samples of similar composition prepared by sputtering have higher compositional disorder and are more inhomogeneous

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