Open AccessLow Energy Ion Implantation and Annealing of Au/Ni/Ti Contacts to n-SiC
Author(s) -
Neelu Shrestha,
Martyn H. Kibel,
Patrick W. Leech,
Anthony S. Holland,
Geoffrey K. Reeves,
M. C. Ridgway,
Phillip Tanner
Publication year - 2017
Publication title -
mrs advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.253
H-Index - 15
eISSN - 2731-5894
pISSN - 2059-8521
DOI - 10.1557/adv.2017.314
Subject(s) - materials science , annealing (glass) , auger electron spectroscopy , ion , ion implantation , analytical chemistry (journal) , auger , metallurgy , atomic physics , chemistry , physics , chromatography , nuclear physics , organic chemistry
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