Open AccessElectrical and optical parameters of Cu6PS5I-based thin films deposited using magnetron sputtering
Author(s) -
I.P. Studenyak
Publication year - 2016
Publication title -
semiconductor physics, quantum electronics and optoelectronics/semiconductor physics quantum electronics and optoelectronics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.185
H-Index - 2
eISSN - 1605-6582
pISSN - 1560-8034
DOI - 10.15407/spqeo19.01.079
Subject(s) - materials science , sputter deposition , thin film , optoelectronics , high power impulse magnetron sputtering , cavity magnetron , sputtering , engineering physics , nanotechnology , engineering