Open AccessFundamental Properties of Metal-Assisted Chemical Etching of Ge Surfaces Mediated by Dissolved O<sub>2</sub> Molecules in Water
Author(s) -
Kenta Arima,
Kentaro Kawai,
Mizuho Morita
Publication year - 2015
Publication title -
hyomen kagaku
Language(s) - English
Resource type - Journals
eISSN - 1881-4743
pISSN - 0388-5321
DOI - 10.1380/jsssj.36.369
Subject(s) - etching (microfabrication) , molecule , metal , isotropic etching , nanoscopic scale , materials science , oxygen , catalysis , atomic force microscopy , chemical engineering , chemistry , nanotechnology , inorganic chemistry , metallurgy , layer (electronics) , organic chemistry , engineering
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