Profilometry with line-field Fourier-domain interferometry | Zendy

Takashi Endo | Zendy; Yoshiaki Yasuno | Zendy; Shuichi Makita | Zendy; Mitsuru Itoh | Zendy; Toyohiko Yatagai | Zendy

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Profilometry with line-field Fourier-domain interferometry

Author(s) -

Takashi Endo,

Yoshiaki Yasuno,

Shuichi Makita,

Mitsuru Itoh,

Toyohiko Yatagai

Publication year - 2005

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/opex.13.000695

Subject(s) - optics , interferometry , fourier transform , focus (optics) , fourier domain , profilometer , frequency domain , physics , line (geometry) , fourier analysis , spatial frequency , fourier optics , computer science , optical coherence tomography , mathematics , computer vision , geometry , quantum mechanics , surface roughness

Line-field Fourier-domain interferometry that is capable of a fast three-dimensional (3-D) shape measurement is proposed. This system is constructed from a combination of a conventional Fourier-domain interferometer and a one-dimensional imaging system. This system directs a line-shaped focus onto a specimen, and a two-dimensional shape can be calculated from a single-shot image of the CCD camera without any mechanical scan. An aspherical mirror and a Japanese coin are presented as a 3-D shape measurement example.

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