Fabrication and characterization of low loss rib chalcogenide waveguides made by dry etching | Zendy

Yinlan Ruan | Zendy; Weitang Li | Zendy; R.A. Jarvis | Zendy; N. R. Madsen | Zendy; Andrei V. Rode | Zendy; Barry LutherDavies | Zendy

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Fabrication and characterization of low loss rib chalcogenide waveguides made by dry etching

Author(s) -

Yinlan Ruan,

Weitang Li,

R.A. Jarvis,

N. R. Madsen,

Andrei V. Rode,

Barry LutherDavies

Publication year - 2004

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/opex.12.005140

Subject(s) - chalcogenide , materials science , fabrication , optics , etching (microfabrication) , refractive index , waveguide , characterization (materials science) , chalcogenide glass , phase (matter) , dry etching , optoelectronics , laser , nanotechnology , chemistry , medicine , alternative medicine , physics , organic chemistry , pathology , layer (electronics)

We report the fabrication and characterization of rib chalcogenide waveguides produced by dry etching with CF4 and O2. The high index contrast waveguides (Deltan ~1) show a minimum propagation loss of 0.25 dB/cm. The high refractive nonlinearity of 100 times silica in As2S3 allowed observation of a pi phase shift due to self-phase modulation of an 8 ps duration 1573 nm pulse in a 5 cm long waveguide.

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