High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions | Zendy

Yuanxin Tan | Zendy; Zhaohui Wang | Zendy; Wei Chu | Zendy; Yang Liao | Zendy; Lingling Qiao | Zendy; Ya Cheng | Zendy

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High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions

Author(s) -

Yuanxin Tan,

Zhaohui Wang,

Wei Chu,

Yang Liao,

Lingling Qiao,

Ya Cheng

Publication year - 2016

Publication title -

optical materials express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.925

H-Index - 66

ISSN - 2159-3930

DOI - 10.1364/ome.6.003787

Subject(s) - isotropy , optics , fabrication , image resolution , numerical aperture , materials science , throughput , lens (geology) , spatial frequency , volume (thermodynamics) , laser , aperture (computer memory) , physics , computer science , telecommunications , acoustics , quantum mechanics , wireless , medicine , wavelength , alternative medicine , pathology

We report on fabrication of three dimensional (3D) microstructures in glass with isotropic spatial resolutions. To achieve high throughput fabrication, we expand the focal spot size with a low-numerical-aperture lens, which naturally results in a degraded axial resolution. We solve the problem with simultaneous spatial temporal focusing which leads to an isotropic laser-affected volume with a spatial resolution of ~100 micron.

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