Open AccessImpact of the precursor gas ratio on dispersion engineering of broadband silicon nitride microresonator frequency combs
Author(s) -
Grégory Moille,
Daron Westly,
Gregory Simelgor,
Kartik Srinivasan
Publication year - 2021
Publication title -
optics letters/optics index
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.524
H-Index - 272
eISSN - 1071-2763
pISSN - 0146-9592
DOI - 10.1364/ol.440907
Subject(s) - silicon nitride , dispersion (optics) , chemical vapor deposition , materials science , refractive index , optics , plasma enhanced chemical vapor deposition , stoichiometry , optoelectronics , silicon , physics , chemistry , organic chemistry