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The surface figure error of a concave spherical mirror was measured using transverse translation diverse phase retrieval (TTDPR), an image-based wavefront sensing technique. Good reproducibility of the surface measurement is demonstrated. Additionally, the TTDPR measurement of the surface, with certain alignment terms removed, is shown to agree with interferometric measurements to 0.0060 waves root mean square.

Verification of transverse translation diverse phase retrieval for concave optical metrology