Effects of defocus on the transfer function of coherence scanning interferometry | Zendy

Rong Su | Zendy; Matthew Thomas | Zendy; Richard Leach | Zendy; Jeremy Coupland | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Open Access

Effects of defocus on the transfer function of coherence scanning interferometry

Author(s) -

Rong Su,

Matthew Thomas,

Richard Leach,

Jeremy Coupland

Publication year - 2017

Publication title -

optics letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.524

H-Index - 272

eISSN - 1071-2763

pISSN - 0146-9592

DOI - 10.1364/ol.43.000082

Subject(s) - optics , interferometry , coherence (philosophical gambling strategy) , optical transfer function , spatial frequency , transfer function , optical coherence tomography , point spread function , materials science , physics , electrical engineering , quantum mechanics , engineering

Coherence scanning interferometry (CSI) offers three-dimensional (3D) measurement of surface topography with high precision and accuracy. Defocus within the interferometric objective lens, however, is commonly present in CSI measurements and reduces both the resolving power of the imaging system and the ability to measure tilted surfaces. This Letter extends the linear theory of CSI to consider the effects of defocus on the 3D transfer function and the point spread function in an otherwise ideal CSI instrument. The results are compared with measurements of these functions in a real instrument. This work provides further evidence for the validity of the linear systems theory of CSI.

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research