Characterization of nanoporous Al2O3 films at terahertz frequencies | Zendy

Min Zhai | Zendy; Alexandre Locquet | Zendy; Mi Jung | Zendy; Deokha Woo | Zendy; D. S. Citrin | Zendy

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Characterization of nanoporous Al₂O₃ films at terahertz frequencies

Author(s) -

Min Zhai,

Alexandre Locquet,

Mi Jung,

Deokha Woo,

D. S. Citrin

Publication year - 2020

Publication title -

optics letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.524

H-Index - 272

eISSN - 1071-2763

pISSN - 0146-9592

DOI - 10.1364/ol.390129

Subject(s) - terahertz radiation , optics , materials science , nanoporous , refractive index , terahertz spectroscopy and technology , characterization (materials science) , optoelectronics , physics , nanotechnology

Terahertz birefringence in nanoporous A l 2 O 3 films grown on Al substrates is characterized nondestructively by polarization-resolved terahertz spectroscopy. Sparse deconvolution is used to find the film thicknesses from the data, showing good agreement with the values measured directly by destructive cross-sectional field-emission scanning electron microscopy.

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