Three-dimensional holographic lithography by an iterative algorithm | Zendy

Joshua J. Cowling | Zendy; G. Williams | Zendy; Alan Purvis | Zendy; Richard McWilliam | Zendy; J. J. Toriz-Garcia | Zendy; N.L. Seed | Zendy; F. B. Soulard | Zendy; P.A. Ivey | Zendy

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Three-dimensional holographic lithography by an iterative algorithm

Author(s) -

Joshua J. Cowling,

G. Williams,

Alan Purvis,

Richard McWilliam,

J. J. Toriz-Garcia,

N.L. Seed,

F. B. Soulard,

P.A. Ivey

Publication year - 2011

Publication title -

optics letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.524

H-Index - 272

eISSN - 1071-2763

pISSN - 0146-9592

DOI - 10.1364/ol.36.002495

Subject(s) - holography , photolithography , lithography , optics , iterative method , image plane , holographic display , volume (thermodynamics) , algorithm , computer science , materials science , image (mathematics) , computer vision , physics , quantum mechanics

We have applied an iterative algorithm for hologram design with multiple output image planes arranged in close proximity to create continuous patterns within an imaging volume. These holograms have been designed for photolithography on three-dimensional surfaces. The influence of simulated image plane separation on the final image, and its suitability for lithography, is assessed. Results are presented and the most suitable case is demonstrated experimentally.

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