Facet-embedded thin-film III–V edge-emitting lasers integrated with SU-8 waveguides on silicon
Author(s) -
Sabarni Palit,
Jeremy D. Kirch,
Mengyuan Huang,
L. J. Mawst,
N.M. Jokerst
Publication year - 2010
Publication title -
optics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.524
H-Index - 272
eISSN - 1071-2763
pISSN - 0146-9592
DOI - 10.1364/ol.35.003474
Subject(s) - materials science , laser , optoelectronics , optics , photolithography , waveguide , facet (psychology) , substrate (aquarium) , semiconductor laser theory , silicon , thin film , coupling loss , semiconductor , optical fiber , physics , nanotechnology , social psychology , oceanography , personality , big five personality traits , geology , psychology
A thin-film InGaAs/GaAs edge-emitting single-quantum-well laser has been integrated with a tapered multimode SU-8 waveguide onto an Si substrate. The SU-8 waveguide is passively aligned to the laser using mask-based photolithography, mimicking electrical interconnection in Si complementary metal-oxide semiconductor, and overlaps one facet of the thin-film laser for coupling power from the laser to the waveguide. Injected threshold current densities of 260A/cm(2) are measured with the reduced reflectivity of the embedded laser facet while improving single mode coupling efficiency, which is theoretically simulated to be 77%.
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