Angular dispersion compensation for acousto-optic devices used for ultrashort-pulsed laser micromachining | Zendy

B. K. A. Ngoi | Zendy; Krishnan Venkatakrishnan | Zendy; L.E.N. Lim | Zendy; Bo Tan | Zendy

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Angular dispersion compensation for acousto-optic devices used for ultrashort-pulsed laser micromachining

Author(s) -

B. K. A. Ngoi,

Krishnan Venkatakrishnan,

L.E.N. Lim,

Bo Tan

Publication year - 2001

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.9.000200

Subject(s) - surface micromachining , optics , materials science , dispersion (optics) , compensation (psychology) , laser , machining , laser beam machining , ultrashort pulse , laser ablation , optoelectronics , laser beams , fabrication , physics , medicine , psychology , alternative medicine , pathology , psychoanalysis , metallurgy

Ultrashort pulsed laser material processing is a new micromachining method that is gaining interest. Its capability of submicrometer machining has been proved. To obtain high speed and highly flexible beam steering, a two-axis acousto-optic deflector is employed. However, dispersion associated with acoustic-optic interaction will cause serious spatial deformation on the writing spot. The compensation for dispersion is proposed and studied. Experiments show promising results. An additional advantage of the proposed compensation method is that it can also precisely control the pulse number, and, hence improve the quality of ablation.

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