Compact titanium dioxide waveguides with high nonlinearity at telecommunication wavelengths

Dense integration of photonic integrated circuits demands waveguides simultaneously fulfilling requirements on compactness, low loss, high nonlinearity, and capabilities for mass production. In this work, titanium dioxide waveguides with a thick core of 380 nm exhibiting a compact mode size (0.43 μm 2 ) and a low loss (5.4 ± 1 dB/cm) at telecommunication wavelengths around 1550 nm have been fabricated and measured. A microring resonator having a 50 μm radius has been measured to have a loaded quality factor of 53500. Four-wave mixing experiments reveal a nonlinear parameter for the waveguides of 21-34 W -1 m -1 corresponding to a nonlinear index around 2.3-3.6 x 10 -18 m 2 /W, which results in a wavelength conversion efficiency of -36.2 dB. These performances, together with the potentially simple dispersion engineering to the fabricated waveguides by the post processes, yield a strong promise for the titanium dioxide waveguides applied in photonic integrated circuits, especially for nonlinear implementations.