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The electric and optical performance of different surface plasmon polariton (SPP) electric modulation structures have been investigated by comparing the response speed and modulation figures of merit (FoM). To overcome the capacitance limitation and improve the response speed, we proposed a novel silver-graphene-dielectric-graphene-semiconductor vertical structure. Semiconductor nano-waveguide is introduced to help reduce ohmic loss in silver waveguide and reflect the leaked optical field back, enhancing the modulation depth. Through optimization, a device with estimated modulation FoM of more than 70% and hundreds of GHz response speed and 3 dB bandwidth is designed, which may bring great improvement to previous optical modulators.

Design of hybrid structure for fast and deep surface plasmon polariton modulation