Experimental demonstration of CMOS-compatible long-range dielectric-loaded surface plasmon-polariton waveguides (LR-DLSPPWs)

We demonstrate the design, fabrication and experimental characterization of long-range dielectric-loaded surface plasmon-polariton waveguides (LR-DLSPPWs) that are compatible with complementary metal-oxide semiconductor (CMOS) technology. The demonstrated waveguide configuration represents a silicon nitride ridge atop a thin strip of metal, which is positioned on a partially oxidized layer of silicon supported by a silicon oxide layer. The demonstrated waveguides feature reasonable mode confinement (~0.5μm2) and show rather long propagation (~700 μm) at telecom wavelengths. Owing to the existence of a metal strip within the structure, one can envision the co-propagation of electrical and photonic signals within the structure, enabling thereby seamless integration of photonic and electronic circuits. Electrical signals in metal strips supporting plasmonic modes can be used for variety of applications, e.g. to control the propagation of radiation via the thermo-optic effect.