Pr and F co-doped SnO_2 transparent conductive films with high work function deposited by ion-assisted electron beam evaporation | Zendy

Shaohang Wu | Zendy; Yantao Li | Zendy; Jinsong Luo | Zendy; Jie Lin | Zendy; Yi Fan | Zendy; Zhihong Gan | Zendy; Xingyuan Liu | Zendy

Open Access

Pr and F co-doped SnO_2 transparent conductive films with high work function deposited by ion-assisted electron beam evaporation

Author(s) -

Shaohang Wu,

Yantao Li,

Jinsong Luo,

Jie Lin,

Yi Fan,

Zhihong Gan,

Xingyuan Liu

Publication year - 2014

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.22.004731

Subject(s) - materials science , transparent conducting film , transmittance , electron beam physical vapor deposition , work function , evaporation , doping , electrical resistivity and conductivity , optoelectronics , thin film , praseodymium , electron mobility , optics , electrical conductor , ion beam , fabrication , nanotechnology , beam (structure) , composite material , physics , engineering , layer (electronics) , electrical engineering , metallurgy , thermodynamics , medicine , alternative medicine , pathology

A transparent conductive oxide (TCO) Pr and F co-doped SnO2 (PFTO) film is prepared by ion-assisted electron beam deposition. An optimized PFTO film shows a high average visible optical transmittance of 83.6% and a minimum electrical resistivity of 3.7 × 10(-3) Ω·cm corresponding to a carrier density of 1.298 × 10(20) cm(-3) and Hall mobility of 12.99 cm(2)/V⋅s. This PFTO film shows a high work function of 5.147 eV and favorable surface morphology with an average roughness of 1.45 nm. Praseodymium fluoride is found to be an effective material to dope F into SnO2 that can simplify the fabrication process of SnO2-based TCO films.

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