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A transparent conductive oxide (TCO) Pr and F co-doped SnO2 (PFTO) film is prepared by ion-assisted electron beam deposition. An optimized PFTO film shows a high average visible optical transmittance of 83.6% and a minimum electrical resistivity of 3.7 × 10(-3) Ω·cm corresponding to a carrier density of 1.298 × 10(20) cm(-3) and Hall mobility of 12.99 cm(2)/V⋅s. This PFTO film shows a high work function of 5.147 eV and favorable surface morphology with an average roughness of 1.45 nm. Praseodymium fluoride is found to be an effective material to dope F into SnO2 that can simplify the fabrication process of SnO2-based TCO films.

Pr and F co-doped SnO_2 transparent conductive films with high work function deposited by ion-assisted electron beam evaporation