Aberration compensation in aplanatic solid immersion lens microscopy | Zendy

Yang Lu | Zendy; Thomas G. Bifano | Zendy; M. Selim Ünlü | Zendy; Bennett B. Goldberg | Zendy

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Aberration compensation in aplanatic solid immersion lens microscopy

Author(s) -

Yang Lu,

Thomas G. Bifano,

M. Selim Ünlü,

Bennett B. Goldberg

Publication year - 2013

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.21.028189

Subject(s) - optics , materials science , lens (geology) , numerical aperture , microscope , spherical aberration , microscopy , deformable mirror , chromatic aberration , microelectromechanical systems , optical microscope , image quality , adaptive optics , scanning electron microscope , optoelectronics , physics , chromatic scale , wavelength , artificial intelligence , computer science , image (mathematics)

The imaging quality of an aplanatic SIL microscope is shown to be significantly degraded by aberrations, especially when the samples have thicknesses that are more than a few micrometers thicker or thinner than the design thickness. Aberration due to the sample thickness error is modeled and compared with measurements obtained in a high numerical aperture (NA ~3.5) microscope. A technique to recover near-ideal imaging quality by compensating aberrations using a MEMS deformable mirror is described and demonstrated.

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