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We demonstrate a Linearized Ring Assisted Mach-Zehnder Interferometer (L-RAMZI) modulator in a miniature silicon device. We measure a record high degree of linearization for a silicon device, with a Spurious Free Dynamic Range (SFDR) of 106dB/Hz²/³ at 1GHz, and 99dB/Hz²/³ at 10GHz.

Linearized silicon modulator based on a ring assisted Mach Zehnder inteferometer