Predictive control of thermally induced wavefront aberrations | Zendy

Aleksandar Haber | Zendy; Alessandro Polo | Zendy; I. Maj | Zendy; Silvania F. Pereira | Zendy; H. P. Urbach | Zendy; Michel Verhaegen | Zendy

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Predictive control of thermally induced wavefront aberrations

Author(s) -

Aleksandar Haber,

Alessandro Polo,

I. Maj,

Silvania F. Pereira,

H. P. Urbach,

Michel Verhaegen

Publication year - 2013

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.21.021530

Subject(s) - wavefront , adaptive optics , optics , deformable mirror , wavefront sensor , controller (irrigation) , physics , model predictive control , computer science , control (management) , artificial intelligence , agronomy , biology

In this paper we experimentally demonstrate the proof of concept for predictive control of thermally induced wavefront aberrations in optical systems. On the basis of the model of thermally induced wavefront aberrations and using only past wavefront measurements, the proposed adaptive optics controller is able to predict and to compensate the future aberrations. Furthermore, the proposed controller is able to correct wavefront aberrations even when some parameters of the prediction model are unknown. The proposed control strategy can be used in high power optical systems, such as optical lithography machines, where the predictive correction of thermally induced wavefront aberrations is a crucial issue.

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