Cost-effective CMOS-compatible grating couplers with backside metal mirror and 69% coupling efficiency | Zendy

Wissem Sfar Zaoui | Zendy; María Félix Rosa | Zendy; Wolfgang Vogel | Zendy; Manfred Berroth | Zendy; Jörg Butschke | Zendy; Florian Letzkus | Zendy

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Cost-effective CMOS-compatible grating couplers with backside metal mirror and 69% coupling efficiency

Author(s) -

Wissem Sfar Zaoui,

María Félix Rosa,

Wolfgang Vogel,

Manfred Berroth,

Jörg Butschke,

Florian Letzkus

Publication year - 2012

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.20.00b238

Subject(s) - grating , materials science , optics , wafer , fabrication , optoelectronics , bandwidth (computing) , cmos , silicon on insulator , wafer bonding , diffraction grating , coupling (piping) , blazed grating , silicon , telecommunications , computer science , physics , medicine , alternative medicine , pathology , metallurgy

A highly efficient grating structure for the coupling between standard optical fibers and single-mode waveguides in the silicon-on-insulator platform realized in a CMOS fabrication process is presented. The cost-effective method introduces a backside metal mirror to the grating coupler without need of an extensive wafer-to-wafer bonding. A coupling efficiency of -1.6 dB (around 69%) near the telecommunication wavelength 1550 nm and a large 1 dB-bandwidth of 48 nm are achieved.

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