Scalable 3D dense integration of photonics on bulk silicon | Zendy

Nicolás Sherwood-Droz | Zendy; Michal Lipson | Zendy

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Scalable 3D dense integration of photonics on bulk silicon

Author(s) -

Nicolás Sherwood-Droz,

Michal Lipson

Publication year - 2011

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.19.017758

Subject(s) - materials science , photonics , optics , extinction ratio , microelectronics , chemical vapor deposition , plasma enhanced chemical vapor deposition , silicon , silicon photonics , optoelectronics , integrated optics , waveguide , annealing (glass) , physics , wavelength , composite material

We experimentally show vertically stacked, multi-layer, low-temperature deposited photonics for integration on processed microelectronics. Waveguides, microrings, and crossings are fabricated out of 400°C PECVD Si3N4 and SiO2 in a two layer configuration. Waveguide losses of ~1 dB/cm in the L-band are demonstrated using standard processing and without post-deposition annealing, along with vertically separated intersections showing -0.04 ± 0.002 dB/cross. Finally 3D drop rings are shown with 25 GHz channels and 24 dB extinction ratio.

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