TiO_2 micro-devices fabricated by laser direct writing | Zendy

Yongsheng Wang | Zendy; Junjie Miao | Zendy; Ye Tian | Zendy; Chuan Fei Guo | Zendy; Jianming Zhang | Zendy; TianLing Ren | Zendy; Qian Liu | Zendy

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TiO_2 micro-devices fabricated by laser direct writing

Author(s) -

Yongsheng Wang,

Junjie Miao,

Ye Tian,

Chuan Fei Guo,

Jianming Zhang,

TianLing Ren,

Qian Liu

Publication year - 2011

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.19.017390

Subject(s) - materials science , etching (microfabrication) , laser , optics , fresnel lens , microlens , optoelectronics , lens (geology) , dry etching , nanostructure , nanotechnology , fresnel zone , diffraction , physics , layer (electronics)

Constructing micro/nanostructures based on TiO2 has attracted increasing attention due to the excellent properties of TiO2. In this study, we report a simple method to directly fabricate TiO2 micro-devices, including Fresnel lens, gear structures and suspended beams only by laser direct writing and selective-etching processing. This route shows great potential in fabricating TiO2 structures for micro-electro-mechanical systems, diffractive optical elements and bio-applications, owing to its maskless process, low cost, and flexible dry/wet alternative etching treatment.

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