Full-field measurement of nonuniform stresses of thin films at high temperature | Zendy

Xuelin Dong | Zendy; Xue Feng | Zendy; Keh-Chih Hwang | Zendy; Shaopeng Ma | Zendy; Qinwei Ma | Zendy

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Full-field measurement of nonuniform stresses of thin films at high temperature

Author(s) -

Xuelin Dong,

Xue Feng,

Keh-Chih Hwang,

Shaopeng Ma,

Qinwei Ma

Publication year - 2011

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.19.013201

Subject(s) - optics , interferometry , materials science , interference (communication) , fourier transform , field (mathematics) , thin film , phase (matter) , substrate (aquarium) , measure (data warehouse) , temperature measurement , stress (linguistics) , physics , channel (broadcasting) , oceanography , electrical engineering , mathematics , quantum mechanics , database , geology , computer science , pure mathematics , nanotechnology , engineering , linguistics , philosophy

Coherent gradient sensing (CGS), a shear interferometry method, is developed to measure the full-field curvatures of a film/substrate system at high temperature. We obtain the relationship between an interferogram phase and specimen topography, accounting for temperature effect. The self-interference of CGS combined with designed setup can reduce the air effect. The full-field phases can be extracted by fast Fourier transform. Both nonuniform thin-film stresses and interfacial stresses are obtained by the extended Stoney's formula. The evolution of thermo-stresses verifies the feasibility of the proposed interferometry method and implies the "nonlocal" effect featured by the experimental results.

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