Ultra-high resolution zone-doubled diffractive X-ray optics for the multi-keV regime | Zendy

Joan VilaComamala | Zendy; Sergey Gorelick | Zendy; Elina Färm | Zendy; Cameron M. Kewish | Zendy; Ana Díaz | Zendy; R. Barrett | Zendy; Vitaliy A. Guzenko | Zendy; Mikko Ritala | Zendy; Christian Dávid | Zendy

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Ultra-high resolution zone-doubled diffractive X-ray optics for the multi-keV regime

Author(s) -

Joan VilaComamala,

Sergey Gorelick,

Elina Färm,

Cameron M. Kewish,

Ana Díaz,

R. Barrett,

Vitaliy A. Guzenko,

Mikko Ritala,

Christian Dávid

Publication year - 2010

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.19.000175

Subject(s) - zone plate , optics , fresnel zone , x ray optics , diffraction , image resolution , resolution (logic) , x ray , fresnel diffraction , microscopy , fabrication , materials science , photon , physics , medicine , alternative medicine , pathology , artificial intelligence , computer science

X-ray microscopy based on Fresnel zone plates is a powerful technique for sub-100 nm resolution imaging of biological and inorganic materials. Here, we report on the modeling, fabrication and characterization of zone-doubled Fresnel zone plates for the multi-keV regime (4-12 keV). We demonstrate unprecedented spatial resolution by resolving 15 nm lines and spaces in scanning transmission X-ray microscopy, and focusing diffraction efficiencies of 7.5% at 6.2 keV photon energy. These developments represent a significant step towards 10 nm spatial resolution for hard X-ray energies of up to 12 keV.

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