Transfer of micro and nano-photonic silicon nanomembrane waveguide devices on flexible substrates | Zendy

Afshin Ghaffari | Zendy; Amir Hosseini | Zendy; Xiaochuan Xu | Zendy; David Kwong | Zendy; Harish Subbaraman | Zendy; Ray T. Chen | Zendy

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Transfer of micro and nano-photonic silicon nanomembrane waveguide devices on flexible substrates

Author(s) -

Afshin Ghaffari,

Amir Hosseini,

Xiaochuan Xu,

David Kwong,

Harish Subbaraman,

Ray T. Chen

Publication year - 2010

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.18.020086

Subject(s) - materials science , silicon , optoelectronics , photonic crystal , stacking , waveguide , layer (electronics) , transfer printing , silicon photonics , photonic integrated circuit , photonics , optics , hybrid silicon laser , interference (communication) , nano , nanotechnology , physics , nuclear magnetic resonance , composite material , channel (broadcasting) , engineering , electrical engineering

This paper demonstrates transfer of optical devices without extra un-patterned silicon onto low-cost, flexible plastic substrates using single-crystal silicon nanomembranes. Employing this transfer technique, stacking two layers of silicon nanomembranes with photonic crystal waveguide in the first layer and multi mode interference couplers in the second layer is shown, respectively. This technique is promising to realize high density integration of multilayer hybrid structures on flexible substrates.

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