Fabrication of diffractive optical elements on 3-D curved surfaces by capillary force lithography | Zendy

Dengying Zhang | Zendy; Weixing Yu | Zendy; Taisheng Wang | Zendy; Zhenwu Lu | Zendy; Qiang Sun | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Open Access

Fabrication of diffractive optical elements on 3-D curved surfaces by capillary force lithography

Author(s) -

Dengying Zhang,

Weixing Yu,

Taisheng Wang,

Zhenwu Lu,

Qiang Sun

Publication year - 2010

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.18.015009

Subject(s) - microfabrication , microscale chemistry , fabrication , lithography , optics , materials science , capillary action , photolithography , x ray lithography , resist , nanoimprint lithography , nanolithography , electron beam lithography , nanotechnology , optoelectronics , physics , composite material , medicine , mathematics education , alternative medicine , mathematics , pathology , layer (electronics)

We demonstrate the fabrication of diffractive optical elements (DOEs) on 3-Dimensional curved surfaces by capillary force lithography (CFL). Curved gratings with a period of 20mum and 820nm have been successfully fabricated in polymer on concave surfaces by CFL. The experiment results indicate that the capillary force lithography is an effective method to replicate DOEs on curved surfaces with a very high fidelity and a relatively fast speed. In addition, we found that the growth rate of the polymer in the sub-microfabrication is much faster and the step height is much closer to the master than that in the microfabrication for CFL, which makes CFL more attractive in the fabrication of DOEs with a sub-microscale or even nanoscale feature size than a microscale feature size.

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research