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An all-silicon, single-mode Bragg cladding rib waveguide
Author(s) -
E. J. Teo,
Andrew A. Bettiol,
B. Q. Xiong,
Mark B. H. Breese,
Prashant T. Shuvan
Publication year - 2010
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.18.008816
Subject(s) - materials science , cladding (metalworking) , optics , silicon , waveguide , refractive index , optoelectronics , single mode optical fiber , etching (microfabrication) , wavelength , optical fiber , nanotechnology , layer (electronics) , physics , metallurgy
In this paper, we demonstrate a direct method of fabricating an all-silicon, single-mode Bragg cladding rib waveguide using proton beam irradiation and subsequent electrochemical etching. The Bragg waveguide consists of porous silicon layers with a low index core of 1.4 that is bounded by eight bilayers of alternating high and low refractive index of 1.4 and 2.4. Here, the ion irradiation acts to reduce the thickness of porous silicon formed, creating an optical barrier needed for lateral confinement. Single-mode guiding with losses as low as approximately 1 dB/cm were obtained for both TE and TM polarization over a broad range of wavelengths from 1525 nm to 1625 nm. Such an approach offers a method for monolithic integration of Bragg waveguides in silicon, without the need for multiple processes of depositing alternating materials.

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