Properties of broadband depth-graded multilayer mirrors for EUV optical systems | Zendy

Andrey Yakshin | Zendy; I. V. Kozhevnikov | Zendy; E. Zoethout | Zendy; E. Louis | Zendy; F. Bijkerk | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Open Access

Properties of broadband depth-graded multilayer mirrors for EUV optical systems

Author(s) -

Andrey Yakshin,

I. V. Kozhevnikov,

E. Zoethout,

E. Louis,

F. Bijkerk

Publication year - 2010

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.18.006957

Subject(s) - optics , materials science , extreme ultraviolet lithography , broadband , wavelength , surface finish , fabrication , optical coating , angle of incidence (optics) , range (aeronautics) , surface roughness , optoelectronics , thin film , physics , composite material , medicine , alternative medicine , pathology , nanotechnology

The optical properties of a-periodic, depth-graded multilayer mirrors operating at 13.5 nm wavelength are investigated using different compositions and designs to provide a constant reflectivity over an essentially wider angular range than periodic multilayers. A reflectivity of up to about 60% is achieved in these calculation in the [0, 18 degrees] range of the angle of incidence for the structures without roughness. The effects of different physical and technological factors (interfacial roughness, natural interlayers, number of bi-layers, minimum layer thickness, inaccuracy of optical constants, and thickness errors) are discussed. The results from an experiment on the fabrication of a depth-graded Mo/Si multilayer mirror with a wide angular bandpass in the [0, 16 degrees] range are presented and analyzed.

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research