Thin film Ag superlens towards lab-on-a-chip integration | Zendy

Claus Jeppesen | Zendy; Rasmus B. Nielsen | Zendy; Alexandra Boltasseva | Zendy; Sanshui Xiao | Zendy; N. Asger Mortensen | Zendy; Anders Kristensen | Zendy

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Thin film Ag superlens towards lab-on-a-chip integration

Author(s) -

Claus Jeppesen,

Rasmus B. Nielsen,

Alexandra Boltasseva,

Sanshui Xiao,

N. Asger Mortensen,

Anders Kristensen

Publication year - 2009

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.17.022543

Subject(s) - superlens , optics , materials science , thin film , lens (geology) , optoelectronics , dielectric , wavelength , fabrication , refractive index , physics , nanotechnology , medicine , alternative medicine , pathology

A thin metal film near-field superlens, as originally suggested by Pendry and realized by Fang et al. and Melville et al., is investigated with emphasis on materials suitable for integration on a lab-on-a-chip platform. A chemically resistant cyclo-olefin copolymer (COC), mr-I-T85 from microresist technology, is applied as dielectric matrix/spacer for an Ag thin film superlens. The superlens successfully resolves 80 nm half-pitch gratings when illuminated with UV radiation at a free space wavelength of 365 nm. The superlens design, fabrication and characterization is discussed.

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