Light Emitting Diodes as an alternative ambient illumination source in photolithography environment | Zendy

Dennis Dan Corell | Zendy; Haiyan Ou | Zendy; Carsten DamHansen | Zendy; Paul-Michael Petersen | Zendy; Dan Friis | Zendy

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Light Emitting Diodes as an alternative ambient illumination source in photolithography environment

Author(s) -

Dennis Dan Corell,

Haiyan Ou,

Carsten DamHansen,

Paul-Michael Petersen,

Dan Friis

Publication year - 2009

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.17.017293

Subject(s) - photolithography , photoresist , color rendering index , light emitting diode , incandescent light bulb , optics , materials science , optoelectronics , diode , led lamp , rendering (computer graphics) , fluorescent lamp , computer science , nanotechnology , computer graphics (images) , physics , layer (electronics)

We explored an alternative light emitting diode (LED) - based solution to replace the existing yellow fluorescent light tubes (YFT) used in photolithography rooms. A no-blue LED lamp was designed and a prototype was fabricated. For both solutions, the spectral power distribution (SPD) was measured, the colorimetric values were calculated, and a visual comparison using Gretagmacbeth colorcharts was performed. The visual comparison showed that the LED bulb was better to render colors despite a low color rendering index (CRI). Furthermore, the LED bulb was tested in a photolithography room and there was no exposure to the photoresist even after 168 hours illumination.

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