High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range | Zendy

Ehsan Shah Hosseini | Zendy; Siva Yegnanarayanan | Zendy; Amir H. Atabaki | Zendy; Mohammad Soltani | Zendy; Ali Adibi | Zendy

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High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range

Author(s) -

Ehsan Shah Hosseini,

Siva Yegnanarayanan,

Amir H. Atabaki,

Mohammad Soltani,

Ali Adibi

Publication year - 2009

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.17.014543

Subject(s) - resonator , materials science , planar , optics , optoelectronics , q factor , silicon nitride , coupling (piping) , substrate (aquarium) , silicon , photonics , wavelength , quality (philosophy) , photonic integrated circuit , physics , quantum mechanics , computer science , metallurgy , geology , oceanography , computer graphics (images)

High quality factor (Q approximately 3.4 x 10(6)) microdisk resonators are demonstrated in a Si(3)N(4) on SiO(2) platform at 652-660 nm with integrated in-plane coupling waveguides. Critical coupling to several radial modes is demonstrated using a rib-like structure with a thin Si(3)N(4) layer at the air-substrate interface to improve the coupling.

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