Open AccessHigh confinement micron-scale silicon nitride high Q ring resonator
Author(s) -
Alexander Gondarenko,
Jacob S. Levy,
Michal Lipson
Publication year - 2009
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.17.011366
Subject(s) - resonator , materials science , optics , silicon nitride , silicon , optoelectronics , absorption (acoustics) , scattering , q factor , nitride , layer (electronics) , physics , nanotechnology
We demonstrate high confinement, low-loss silicon nitride ring resonators with intrinsic quality factor (Q) of 3*10(6) operating in the telecommunication C-band. We measure the scattering and absorption losses to be below 0.065dB/cm and 0.055dB/cm, respectively.
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