Optical MEMS pressure sensor based on a mesa-diaphragm structure | Zendy

Yixian Ge | Zendy; Ming Wang | Zendy; Haitao Yan | Zendy

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Optical MEMS pressure sensor based on a mesa-diaphragm structure

Author(s) -

Yixian Ge,

Ming Wang,

Haitao Yan

Publication year - 2008

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.16.021746

Subject(s) - diaphragm (acoustics) , mesa , pressure sensor , microelectromechanical systems , optics , planar , materials science , sensitivity (control systems) , interference (communication) , signal (programming language) , linearity , optoelectronics , acoustics , electronic engineering , computer science , channel (broadcasting) , engineering , physics , telecommunications , vibration , mechanical engineering , computer graphics (images) , programming language

An optical MEMS pressure sensor based on a mesa-diaphragm is presented. The operating principle of the sensor is expatiated by Fabry-Perot (F-P) interference. Both the mechanical model and the signal averaging effect of the mesa diaphragm is validated by simulation, which declares that the mesa diaphragm is superior to the planar one on the parallelism and can reduce the signal averaging effect. Experimental results demonstrate that the mesa structure sensor has a reasonable linearity and sensitivity.

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