Sensitivity dependences on side length and aspect ratio of a diaphragm in a glass-based guided-wave optical pressure sensor | Zendy

Hiroyuki Nikkuni | Zendy; Yu Watanabe | Zendy; Masashi Ohkawa | Zendy; Takashi Satō | Zendy

Open Access

Sensitivity dependences on side length and aspect ratio of a diaphragm in a glass-based guided-wave optical pressure sensor

Author(s) -

Hiroyuki Nikkuni,

Yu Watanabe,

Masashi Ohkawa,

Takashi Satō

Publication year - 2008

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.16.015024

Subject(s) - diaphragm (acoustics) , optics , materials science , sensitivity (control systems) , pressure sensor , waveguide , aspect ratio (aeronautics) , acoustics , optoelectronics , vibration , physics , electronic engineering , engineering , thermodynamics

According to our previous theoretical study, sensor sensitivity is proportional to the cube of the side length of the diaphragm in a guided-wave optical pressure sensor consisting of a glass diaphragm and a single-mode waveguide on the diaphragm. Also, to obtain higher sensitivity, an aspect ratio of the diaphragm should be approximately 1 for two waveguide positions: the center and the edge of the diaphragm. In this study, sensitivity dependences on side length and aspect ratio of the diaphragm were experimentally examined. The obtained experimental results strongly supported the theoretical predictions.

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