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Ultrafast high-density photonic integrated circuit devices (PICDs) are not easily obtained using traditional index-guiding mechanisms. In this paper, photonic bandgap crystal resonator enhanced, laser-controlled modulations of optical interconnect PICDs were achieved in slab-type mix-guiding configuration - through developed CMOS-compatible processing technologies. The devices, with smallest critical dimensions of 90 nm have footprints of less than 5 x 5 microm(2). Quality-factors an order larger than previously realized was achieved. Through use of effective coupling structures; simultaneous alignment for probing and pumping laser beams, optical measurements of both instantaneous free carriers induced device modulations were obtained together with thermo-optical effects characterizations.

Photonic bandgap crystal resonator enhanced, laser controlled modulations of optical interconnects for photonic integrated circuits