Wide frequency range measurements of absolute phase and amplitude of vibrations in micro- and nanostructures by optical interferometry | Zendy

Hanne Martinussen | Zendy; Astrid Aksnes | Zendy; Helge E. Engan | Zendy

Open Access

Wide frequency range measurements of absolute phase and amplitude of vibrations in micro- and nanostructures by optical interferometry

Author(s) -

Hanne Martinussen,

Astrid Aksnes,

Helge E. Engan

Publication year - 2007

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.15.011370

Subject(s) - interferometry , optics , amplitude , transducer , vibration , heterodyne (poetry) , absolute phase , astronomical interferometer , phase (matter) , physics , materials science , acoustics , phase noise , quantum mechanics

A heterodyne interferometer has been built in order to characterize vibrations on micro- and nanostructures. The interferometer offers the possibility of both absolute phase and high resolution absolute amplitude vibrational measurements. By using two acousto-optic modulators (AOMs) in one of the interferometer arms and varying the frequency inputs of both, the setup is designed to measure vibrations in the entire frequency range 0 - 1.2GHz. The system is here demonstrated on Capacitor Micromachined Ultrasonic Transducers (CMUTs) and a PZT transducer to show measurements from 5kHz up to 35MHz. We have measured absolute amplitudes with picometer resolution.

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