X-ray ultramicroscopy using integrated sample cells

The X-ray ultramicroscope (XuM), based on using a scanning electron microscope as host, provides a new approach to X-ray projection microscopy. The right-angle-type integrated sample cells described here expand the capabilities of the XuM technique. The integrated sample cell combines a target, a spacer, a sample chamber, and an exit window in one physical unit, thereby simplifying the instrumentation and providing increased mechanical stability. The XuM imaging results presented here, obtained using such right-angle integrated sample cells, clearly demonstrate the ability to characterize very small features in objects, down to of order 100nm, including their use for dry, wet and even liquid samples.