Open AccessHigh confinement suspended micro-ring resonators in silicon-on-insulator
Author(s) -
Linnell Martinez,
Michal Lipson
Publication year - 2006
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.14.006259
Subject(s) - resonator , materials science , silicon on insulator , suspension (topology) , optics , silicon , optoelectronics , q factor , physics , mathematics , homotopy , pure mathematics
We demonstrate suspended micrometer-scale ring resonators with quality factors exceeding 15,000. The high quality factor is achieved by using a suspension method where the disturbance of the optical mode due to the support arms is minimized. We show an insertion loss of less than .02dB per suspension bridge.
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