Blazed grating fabrication through gray-scale Xray lithography | Zendy

Pantazis Mouroulis | Zendy; Frank Hartley | Zendy; Daniel W. Wilson | Zendy; Victor White | Zendy; Aidan Shori | Zendy; Steven Nguyen | Zendy; Min Zhang | Zendy; Martin Feldman | Zendy

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Blazed grating fabrication through gray-scale Xray lithography

Author(s) -

Pantazis Mouroulis,

Frank Hartley,

Daniel W. Wilson,

Victor White,

Aidan Shori,

Steven Nguyen,

Min Zhang,

Martin Feldman

Publication year - 2003

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.11.000270

Subject(s) - optics , lithography , fabrication , materials science , grating , x ray lithography , resist , diffraction efficiency , diffraction grating , electron beam lithography , nanoimprint lithography , next generation lithography , optoelectronics , blazed grating , nanotechnology , physics , medicine , alternative medicine , pathology , layer (electronics)

Blazed gratings have been fabricated using gray-scale X-ray lithography. The gratings have high efficiency, low parasitic light, and high groove quality. The fabrication technique and resist characterization are described. The gratings can be generated over a considerable range of distances from the X-ray mask, thus demonstrating the ability to write gratings on a substrate of effectively arbitrary shape.

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