High-performance thin-film optical filters with stress compensation | Zendy

Thomas Bégou | Zendy; Fabien Lemarchand | Zendy; Frédéric Lemarquis | Zendy; Antonin Moreau | Zendy; Julien Lumeau | Zendy

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High-performance thin-film optical filters with stress compensation

Author(s) -

Thomas Bégou,

Fabien Lemarchand,

Frédéric Lemarquis,

Antonin Moreau,

Julien Lumeau

Publication year - 2019

Publication title -

journal of the optical society of america a

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.803

H-Index - 158

eISSN - 1520-8532

pISSN - 1084-7529

DOI - 10.1364/josaa.36.00c113

Subject(s) - flatness (cosmology) , materials science , broadband , optics , band pass filter , optical filter , thin film , compensation (psychology) , sputtering , optoelectronics , sputter deposition , stress (linguistics) , optical coating , physics , nanotechnology , psychology , cosmology , quantum mechanics , psychoanalysis , linguistics , philosophy

We present a thorough description of high-performance thin-film optical filters with high flatness. These components can combine several tens or hundreds of layers and are manufactured using plasma-assisted reactive magnetron sputtering. Stress compensation is achieved using dual-side coatings with appropriate spectral function. Examples are described of highly reflecting mirrors at 515 nm with 15 nm flatness peak-to-valley up to and over 75 mm diameter aperture, narrow bandpass filters, and filters with broadband controlled transmission.

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