Open AccessNovel Deep Glass Etched Microring Resonators Based on Silica-on-Silicon Technology
Author(s) -
Haiyan Ou,
Karsten Rottwitt,
Hugh T. Philipp
Publication year - 2006
Publication title -
citeseer x (the pennsylvania state university)
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1364/ipra.2006.imb4
Subject(s) - resonator , silicon , materials science , etching (microfabrication) , fabrication , silica glass , optoelectronics , nanotechnology , composite material , layer (electronics) , medicine , alternative medicine , pathology
Microring resonators fabricated in silica-on-silicon technology using deep glass etching are demonstrated. The fabrication procedures are introduced and the transmission spectrum of a resonator is presented.
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