Fabrication, characterization, and simulation of a cantilever-based airflow sensor integrated with optical fiber | Zendy

Mohammad Sadegh Cheri | Zendy; Hamid Latifi | Zendy; Farzin Beygi Azar Aghbolagh | Zendy; O.R. Ranjbar-Naeini | Zendy; Majid Taghavi | Zendy; M. Ghaderi | Zendy

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Fabrication, characterization, and simulation of a cantilever-based airflow sensor integrated with optical fiber

Author(s) -

Mohammad Sadegh Cheri,

Hamid Latifi,

Farzin Beygi Azar Aghbolagh,

O.R. Ranjbar-Naeini,

Majid Taghavi,

M. Ghaderi

Publication year - 2013

Publication title -

applied optics

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.668

H-Index - 197

eISSN - 2155-3165

pISSN - 1559-128X

DOI - 10.1364/ao.52.003420

Subject(s) - cantilever , airflow , fabrication , optics , optical fiber , materials science , characterization (materials science) , fiber , fiber optic sensor , nanotechnology , mechanical engineering , physics , engineering , composite material , medicine , alternative medicine , pathology

In this paper, we present the fabrication and packaging of a cantilever-based airflow sensor integrated with optical fiber. The sensor consists of a micro Fabry-Perot (FP) cavity including a fiber and a micro cantilever that is fabricated using the photolithography method. Airflow causes a small deflection of the micro cantilever and changes the cavity length of the FP, which makes the fringe shift. The pressure distribution and velocity streamlines across the cantilever resulted from the airflow in the channel have been simulated by the finite element method. The experimental results demonstrate that the sensor has a linear sensitivity of 190 [fringe shift (pm)] per (l/min) and a minimum detectable airflow change of 0.05 (l/min).

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