Open AccessDecreasing Energy Costs in Epitaxial Growth from Gas Phase System by Optimization of Pressure
Author(s) -
E. L. Pankratov,
E. A. Bulaeva
Publication year - 2013
Publication title -
advances in energy and power
Language(s) - English
Resource type - Journals
eISSN - 2333-2700
pISSN - 2333-3278
DOI - 10.13189/aep.2013.010201
Subject(s) - epitaxy , gas phase , energy (signal processing) , materials science , phase (matter) , environmental science , process engineering , nuclear engineering , chemistry , thermodynamics , nanotechnology , engineering , physics , organic chemistry , layer (electronics) , quantum mechanics
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