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Deviation in Nano-Mechanical Properties of Ceramic Nano Composite Thin Films
Author(s) -
A. S. Bhattacharyya,
Ramagiri Praveen Kumar
Publication year - 2017
Publication title -
material science research india
Language(s) - English
Resource type - Journals
eISSN - 2394-0565
pISSN - 0973-3469
DOI - 10.13005/msri/140101
Subject(s) - nanoindentation , materials science , ceramic , composite material , sputter deposition , nano , hardening (computing) , indentation , coating , thin film , sputtering , modulus , anisotropy , substrate (aquarium) , composite number , nanotechnology , optics , layer (electronics) , oceanography , physics , geology
Ceramic hard Coatings based on Si, C , N, Ti and B were developed using magnetron sputtering, applicable for protecting the underlying substrate. Different morphological patterns were observed on the coating surface due to sputtering. Nano indentation was used to determine the hardness and modulus of the coatings. The deviations in H and E values were attributed to indentation positions, thin film stress and anisotropy. Evidence of strain hardening was found during loading.

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