Diffusion in Semiconductors by Using Fourier Series Expansion Technique
Author(s) -
M.K. El-Adawi,
S. Abdelghany,
Samah M. Shalaby
Publication year - 2014
Publication title -
material science research india
Language(s) - English
Resource type - Journals
eISSN - 2394-0565
pISSN - 0973-3469
DOI - 10.13005/msri/110201
Subject(s) - fourier series , doping , fourier transform , diffusion , silicon , materials science , semiconductor , diffusion equation , indium , condensed matter physics , mathematical analysis , physics , mathematics , thermodynamics , optoelectronics , engineering , metric (unit) , operations management
Doping by diffusion is still one of acceptable and important methods that have essential technological applications. A theoretical approach to study diffusion in semi-conductors is introduced. The diffusion equation together with Fick’s law and mass balance equation are solved to obtain the concentration function and the mass penetration depth using Fourier Series expansion technique. Doping of indium, phosphorus, gallium and Arsenic in Silicon as illustrative examples are given.
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