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Model Surfaces Produced by Atomic Layer Deposition
Author(s) -
Rick B. Walsh,
Shaun C. Howard,
Andrew Nelson,
William Skinner,
Guangming Liu,
Vincent S. J. Craig
Publication year - 2012
Publication title -
chemistry letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.492
H-Index - 114
eISSN - 1348-0715
pISSN - 0366-7022
DOI - 10.1246/cl.2012.1247
Subject(s) - chemistry , atomic layer deposition , layer (electronics) , deposition (geology) , nanotechnology , chemical engineering , organic chemistry , paleontology , materials science , sediment , engineering , biology
Atomic layer deposition is used with the aim of producing new model surfaces suitable for fundamental wet surface science investigations. Alumina surfaces are found to dissolve in aqueous solutions, although they can be passivated against dissolution by adsorption. Highly useful thick titania films can be produced by employing low temperatures during formation, whereas hafnia and zirconia films have a tendency to produce films that crystallize, and this increases the roughness of the films. © 2012, The Chemical Society of Japan

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