Open AccessNano/Micro Patterning of Inorganic Thin Films
Author(s) -
Kunihito Koumoto,
Noriko Saito,
Yanfeng Gao,
Yoshitake Masuda,
Peng Zhu
Publication year - 2008
Publication title -
bulletin of the chemical society of japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.145
H-Index - 99
eISSN - 1348-0634
pISSN - 0009-2673
DOI - 10.1246/bcsj.81.1337
Subject(s) - template , nucleation , substrate (aquarium) , nanotechnology , monolayer , chemistry , thin film , deposition (geology) , self assembled monolayer , ceramic , chemical engineering , materials science , organic chemistry , paleontology , oceanography , sediment , geology , engineering , biology