Open AccessFormation Process of Aluminium Nitride by the Vapor-phase Reaction of Aluminium Trichloride with Ammonia
Author(s) -
Yuzo Saeki,
Suh Ho Park,
Akimasa Yajima,
M. Akiyama
Publication year - 1984
Publication title -
bulletin of the chemical society of japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.145
H-Index - 99
eISSN - 1348-0634
pISSN - 0009-2673
DOI - 10.1246/bcsj.57.2673
Subject(s) - aluminium , ammonia , chemistry , aluminium nitride , nitride , inorganic chemistry , phase (matter) , vapor phase , reaction conditions , chemical engineering , metallurgy , catalysis , organic chemistry , materials science , layer (electronics) , thermodynamics , physics , engineering